Using Glass Capillary Array as Filters

This interactive demonstration shows how glass capillary arrays (GCAs) function as precision particle filters. Watch as particles of different sizes approach the GCA—only those smaller than the hole size can pass through, while larger particles are blocked and bounce back.

Critical Applications:

• EUV Lithography: In extreme ultraviolet semiconductor manufacturing, even nanometer-scale particles can cause defects in microchips. GCAs with sub-micron holes filter contamination from process gases and cleaning solutions.
• Cleanroom Environments: Semiconductor fabs require ultra-clean conditions where particle contamination must be controlled to parts-per-billion levels. GCAs provide precise size-selective filtration for critical processes.

Adjust the GCA hole size using the slider below to see how different particle sizes are filtered—demonstrating the principle behind these precision filtration systems.